MEMS Electrostatic Actuator

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Author name
Steven Samuel
Source
Sketchfab
Polygon Count
600
Release Date
2021-05-08
License
CC BY 4.0
microdriveelectronicsmemescombactuatorelectrostaticmemscapacitanceconceptcombdrive

Asset Overview

15-finger electrostatic MEMS comb-drive actuator